Application of Pulsed Digital Oscillators (pdo) to the In-situ Mechanical Test of Mems for Space Applications
نویسندگان
چکیده
The objective of this work is to propose Pulsed Digital Oscillators as a possible tool for the in situ monitoring of MEMS in space applications. The reliability of MEMS devices is an important issue for space applications. These devices are prone to mechanical as well as electrical damages. Although extensive knowledge exists on the failure mechanisms of microelectronic devices, there is no standard procedure to evaluate mechanical and electrical damages in MEMS. PDOs are simple circuits that can monitor the resonant frequency of a MEMS resonator, and therefore can be used to monitor the integrity of these devices.
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